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MANTIS UHV Deposition Components &
Systems
MANTIS
Deposition is dedicated to the manufacture of high-quality
deposition components for cutting-edge applications. Our
product offerings include; nanocluster deposition sources and
systems, RF atom and RF ion sources, e-beam evaporators, k-cells and
thermal gas crackers.
MANTIS sources are technologically advanced to ensure
the highest reliability, ease-of-use and offer the best
performance/cost ratio in the industry. MANTIS k-cells, e-beam
evaporators, thermal gas crackers and the smaller ion and atom
sources are well suited to small scale research studies in MBE,
surface science or PVD. For production, the MANTIS 175mm
diameter RF atom source or 130mm diameter RF ion source can process
substrates up to 8" and beyond.
Our UHV deposition
systems are designed to be extremely versatile with many
retrofittable options to meet the demands of future
requirements. The deposition of nanoclusters is a leading edge
method of producing film characteristics that are unachievable
through conventional thin film coating methods. MANTIS takes
your research and development to a new level.

Mantis will be
exhibiting at the APS Conference in Montreal, March 22-24th
2004. See us at booth #203.
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